Optics Beamline

• Collimated PGM (SX700-1)
• 10 - 2000 eV
• Moderate resolution
• Polarisation linear
• Efficient higher order light suppression
• Low divergence, small spot size

Reflectometer Experimental Station

• Reflectometry
• At-wavelength metrology
• Quality control of large optical elements
• In-house R&D
• User operation
• Short-term access

This soft x-ray bending magnet beamline is equipped with a Plane Grating Monochromator operated in collimated light (collimated PGM). It uses the SX700-1 monochromator equipped with two blazed diffraction gratings produced in-house. The bending magnet beamline is optimised for moderate resolution at very high specular purity and efficient stray light reduction by a 4-mirror High order suppressor (HIOS) and a Filter and Slit Unit (FSU).

At this beamline a versatile reflectometer for at-wavelength metrology is coupled. This 10-axes instrument allows characterisation of real live-sized optical elements. This permanent endstation is located in a clean-room hutch.

The Optics Beamline with the reflectometer is primarily dedicated to the in-house R&D in optics development and at-wavelength metrology of our in-house produced diffraction gratings and (multilayer) optical elements.

Beamtime at this station is available by user-proposals or, at short-term request, by cooperation with our Institute for Nanometre Optics and Technology (FG-INT).

Reflectometry Station

Reflectometry - At-wavelength metrology

• Quality control of optical elements
• In-house R&D
• User operation
• Short-term access

The versatile 10 axes UHV-reflectometer is a permanent end station of the Optics Beamline delivering UV and XUV radiation. It is located in a clean-room hutch at DIP 1.1.

The samples are adjustable within six degrees of freedom, and the reflectivity can be measured at all incidence angles for both s- and p-polarisation geometry.

The reflectometer is primarily dedicated to the in-house R&D in optics development and at-wavelength metrology of our in-house produced diffraction gratings and (multilayer) optical elements.

Beamtime at this station is available by user-proposals or, at short-term request, by cooperation with our Institute for Nanometre Optics and Technology (FG-INT).

Film - click on Downloads in box on right side: reflectometer-film.mp4